| 摘要 |
<p>PROBLEM TO BE SOLVED: To suppress variation in the resistance value of a built-in resistor even when firing is repeated, by setting the softening temperature of glass powder for use in built-in resistor paste and that of glass powder for use in green sheets in a specified relation. SOLUTION: A green sheet using glass powder and an internal circuit containing conductive powder are simultaneously fired to form a low- temperature fired substrate. Letting the softening temperature of glass powder used in built-in resistor paste obtained by dispersing the conductive power and glass powder in vehicle be Tr deg.C, and the softening temperature of the glass powder for use in the green sheet be Ti deg.C, Tr and Ti are controlled so that the relation expressed as Ti >=Tr >=Ti -50 will hold. That is, to suppress variation in the resistance value of a built-in resistor due to repeated firing, the softening temperature Tr of glass for use in built-in resistor paste may be made to approach the softening temperature Ti of glass for use in green sheets. This makes it possible to make the resistance value of a built-in resistor resistant to temperature during repeated firing.</p> |
