发明名称 |
Confocal optical microscope and length measuring device using this microscope |
摘要 |
A first a confocal optical microscope in which a good image with high contrast can be observed with which a bright image can be observed over a long time interval. The confocal optical microscope has a quarter wave plate arranged in an optical path between an imaging lens and an objective such that it is inclined relative to a reference optics axis extending between the imaging lens and the objective. Furthermore, the confocal optical microscope has a shortwave radiation attenuator for attenuating light radiated from the light source with wavelengths of less than or equal to 340 nm. The confocal optical microscope can form part of a length measuring device which can take a length measurement of a sample to be measured with high measurement accuracy and high reproducibility. The length measuring device also has a movable carrier, a carrier device for a sample to be measured, a computing device, a display device and a control device.
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申请公布号 |
US5638206(A) |
申请公布日期 |
1997.06.10 |
申请号 |
US19940314650 |
申请日期 |
1994.09.29 |
申请人 |
USHIODENKI KABUSHIKI KAISHA |
发明人 |
SUMIYA, MASATO;SUZUKI, SHINJI |
分类号 |
G01B9/04;G01B11/02;(IPC1-7):G02B21/00;G02B21/06;G02B21/26 |
主分类号 |
G01B9/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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