发明名称 SEMICONDUCTOR DEVICE MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To improve the electric connection reliability of a semiconductor element to inner leads of a tap carrier by forming stud bumps on Au plated inner leads and bonding the bumps en bloc to electrode pads on the semiconductor element by a bonding tool. SOLUTION: The surface of inner leads 5 is plated with Au to form a carrier tape. Stud bumps 7 are formed by the Au wire bonding on the inner leads 5 located at the centers of electrode pads 9 on a semiconductor element 8, accurately positioned to the pads 9 and bonded en bloc by the stress, heat or ultrasonic energy of a bonding tool 11. This enables the assembly of a stud bump type TPC at high yield, without cracking the pads 9 and parts beneath them.
申请公布号 JPH09153517(A) 申请公布日期 1997.06.10
申请号 JP19950311831 申请日期 1995.11.30
申请人 OKI ELECTRIC IND CO LTD 发明人 TAKAHASHI YOSHIKAZU
分类号 H01L21/60;H01L21/603 主分类号 H01L21/60
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