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发明名称
FORMING METHOD OF LAYOUT PATTERN
摘要
申请公布号
JPH09153555(A)
申请公布日期
1997.06.10
申请号
JP19950313226
申请日期
1995.11.30
申请人
SHARP CORP
发明人
NISHIO OSAMU
分类号
H01L27/092;G06F17/50;H01L21/8238;(IPC1-7):H01L21/823
主分类号
H01L27/092
代理机构
代理人
主权项
地址
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