| 摘要 |
PROBLEM TO BE SOLVED: To provide an X-ray generating device in which breakage of an optical element arranged in a vacuum container of the X-ray generating device, or deterioration of functions or characteristics of it caused by scattered particles jetted to the back side of a target member, or an excitation energy beam passing the target member can be prevented. SOLUTION: In this device, at least an excitation energy beam 10 is radiated to a tape type target member 105 contained in a cassette or cartridge 106 to generate plasma 103, so an X-ray radiated from the plasma 103 is taken. In the cassette or cartridge 106, aperture parts 111, 112 of such a size that the excitation energy beam 101 passing the target member 105 or most of scattered particles discharged from the target member 105 pass through without getting in contact with them are provided at a part positioned on an extended line of an optical axis of the excitation energy beam 101 and/or a part positioned on a normal line of the target member 105 at a radiation position of the excitation energy beam 101. |
