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发明名称
SEMICONDUCTOR WAFER CHAMFERED FACE POLISHING METHOD AND DEVICE THEREOF
摘要
申请公布号
JPH09150357(A)
申请公布日期
1997.06.10
申请号
JP19950311359
申请日期
1995.11.29
申请人
MITSUBISHI MATERIALS CORP;MITSUBISHI MATERIALS SHILICON CORP
发明人
KAWAGUCHI AKIRA;MUNEZANE KENJI;TSURUTA SHOJI;KUMABE SHIGEO
分类号
B24B9/00;(IPC1-7):B24B9/00
主分类号
B24B9/00
代理机构
代理人
主权项
地址
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