| 摘要 |
PROBLEM TO BE SOLVED: To provide a nozzle standby pot which is excellent in chemical resistance and facilitates the observation of the inside. SOLUTION: A developer is supplied via a developer discharge nozzle 6 to the front surface of a substrate 2 exposed with desired patterns. As a result, the patterns exposed on the substrate 2 surface are developed. A standby pot 7 is disposed near a substrate supporting member 1 to be placed with the substrate 2. The standby pot 7 accepts the developer discharge nozzle 6 saved from above the substrate 2 and is held standing by before the next development processing. The standby pot 7 has sufficient chemical resistance to the developer and is composed of a transparent resin material so as to facilitate the internal observation. Such resin includes, for example, non-crystalline polyolefin (APO). A transparent resin plate (for example, acrylic plate) coated with a non- crystalline polyolefin or transparent fluororsin is equally well. |
