| 摘要 |
PROBLEM TO BE SOLVED: To provide a wafer transfer device making feasible of the simplification and acceleration of the wafer alignment, simultaneous performance of the alignment and inversion as well as the increase in the shifting efficiency. SOLUTION: This wafer transfer device is provided with a carrier 20, a package container 30, a wafer inverting part 60, a suction handle 40 and a wafer shifting part 70. The carrier 20 elevates while the package container 30 is fixed. Within the wafer shifting part 70, an alignment unit 61 making alignment of wafer 20 or wafer 10 carried from the package container 30 by pushing in to make them abut against is fitted to a rotatable base plate 64, within the suction handle 40, the wafer 10 is carried in both directions between the carrier 20 and the wafer shifting part 60 while within the wafer shifting part 70, the wafer 10 is carried in both directions between the wafer inverting part 60 and the package container 30. |
