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发明名称
RESIST ASHING METHOD AND DEVICE
摘要
申请公布号
JPH09153483(A)
申请公布日期
1997.06.10
申请号
JP19950313356
申请日期
1995.11.30
申请人
SONY CORP
发明人
KADOMURA SHINGO
分类号
H01L21/302;H01L21/027;H01L21/3065;(IPC1-7):H01L21/306
主分类号
H01L21/302
代理机构
代理人
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地址
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