摘要 |
PROBLEM TO BE SOLVED: To provide an internal intra-corporeal instrument having a sensor function capable of detecting the size and direction of the load applied to the tip. SOLUTION: The sensor chip 15 of a force sensor 14 is fitted to the tip section of a base 13 arranged in a tube 12 by adhesion or the like. Diffusion strain gauges R1-R8 are formed along the X-axis direction or the Y-axis direction on the upper face 20a of the sense section 20 of a sensor chip 15. A cap 16 fitted with a detection section 17 on its upper face 16a is fitted to the upper face 20a of the sense section 20, and the load applied to the tip of a catheter 11 is transferred to the sense section 20 to warp it. The diffusion strain gauges R1-R8 are bridge-connected for the X-axis direction or the Y-axis direction, and they output detection signals Vx, Vy in response to the warp of the sense section 20. |