| 摘要 |
PCT No. PCT/FR94/01155 Sec. 371 Date May 23, 1996 Sec. 102(e) Date May 23, 1996 PCT Filed Oct. 4, 1994 PCT Pub. No. WO95/10169 PCT Pub. Date Apr. 13, 1995A device for forming a microwave plasma including an ionizing chamber wherein a gas can be introduced so as to undergo excitation induced by the presence of a high frequency alternating electric field produced by a plurality of metal antennas. The device includes a gas-free volume wherein metal antennas are arranged parallel to one another and are distributed at the nodes of a regular plane array, an end of each antenna extending from the gas-free volume in the ionizing chamber and an induction loop producing microwaves in the gas-free volume.
|
