| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas heat transfer method, which clarifies the main cause for settling the efficiency of cooling and heating and can cool or heat properly at the smallest amount of gas on the optimum condition. SOLUTION: This method is a method, wherein a low-temperature member 37 for cooling use is brought into contact with a work 36 via medium gas in a vacuum container 31 and the work 36 is cooled or heated by the heat transfer action of the medium gas. At this time, the pressure of the medium gas between the member 37 and the work 36 is kept at 2.5 to 12Torr and the interval between the member 37 and the work 36 is kept at an interval of 300μm or shorter on the average.
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