ELECTRODE FOR USE IN A PLASMA ASSISTED CHEMICAL ETCHING PROCESS,申请号IL19940109588-传众专利搜索

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发明名称	ELECTRODE FOR USE IN A PLASMA ASSISTED CHEMICAL ETCHING PROCESS
摘要
申请公布号	IL109588(A)	申请公布日期	1997.06.10
申请号	IL19940109588	申请日期	1994.05.06
申请人	HUGHES AIRCRAFT COMPANY	发明人
分类号	C23F4/00;H01J27/08;H01J37/08;H01J37/32;H01L21/302;H01L21/3065;(IPC1-7):H01L21/30	主分类号	C23F4/00
代理机构		代理人
主权项
地址

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