发明名称 PHASE SHIFTER ALLOCATION SYSTEM AND PHASE SHIFTER ALLOCATION METHOD
摘要 PROBLEM TO BE SOLVED: To provide phase shift patterns having the decreased points where the patterns of the same phase patterns are adjacent to each other. SOLUTION: A phase determining means 5 successively selects undefined patterns when the phase shift allocation commands are output. The phases of the selected patterns are determined in the phases different from the phases at which the many adjacent patterns are determined in accordance with the adjacent pattern phase information of the selected patterns, by which the contents of the defined phase data are updated. A phase information setting means 4 adds a prescribed value to the adjacent pattern phase information of the adjacent patterns determined in the phase every time the phase is determined by a phase determining means. As a result, the many adjacent patterns of the respective patterns are set in the phases different from the set phases. Then, the places where the patterns of the same phase are eventually adjacent to each other are decreased.
申请公布号 JPH09152709(A) 申请公布日期 1997.06.10
申请号 JP19950311759 申请日期 1995.11.30
申请人 HOYA CORP 发明人 SAWADA HIDEKI
分类号 G03F1/30;G03F1/68;H01L21/027 主分类号 G03F1/30
代理机构 代理人
主权项
地址