| 摘要 |
PROBLEM TO BE SOLVED: To automatically obtaine an accurate BTT(Break-Through Time) so as to realize the proper control of TDT(Total Development Time) in a resist developing process. SOLUTION: Waveform data written in a waveform memory 21 are repeatedly read out in an intermediate time period between an estimated BTT and a TDT, and a BTT is obtained through a BTT operation part 29 applying arithmetic algorithms A (i) to ideal waveform data with no noise and pseudo- waveform data varied in noise level, and the average value and the maximum deviation of a BTT related to data read out many times from the wave form memory 21 are obtained for each noise level concerning pseudo-waveform data varied in noise level. Algorism where the deviation is smaller than a threshold value and the average value is closest to a BTT which is obtained by applying the same algorism to ideal waveform data is selected out, and a BTT is obtained by applying the algorism to the final read-out data of waveform. |
