| 摘要 |
PROBLEM TO BE SOLVED: To make a replacement of substrates in parallel with implantation of ions into the substrate at the same time. SOLUTION: A rotary drum 11 is mounted with four substrate holder units 14 which are arranged on its peripheral surface separate from each other by an angle of 90 deg. and rotated in a certain direction stepping by an angle of 90 deg.. A substrate implanted with ions is replaced with another substrate not implanted with ions at a substrate holder unit 14 located at an uppermost position and kept in a horizontal position, the rotary drum 11 is rotated by an angle of 90 deg. to make the substrate 1 confront an ion source 9, and ions are implanted into the substrate 1. While ions are implanted, the substrate is replaced at the substrate holder unit 14 located at the uppermost position and held in a horizontal position at the same time. When an electrostatic chuck is provided to the substrate holder unit, elimination of static from the chuck is started when ion implantation is finished and finished before an implanted substrate reaches to a substrate replacing position. |
