Plasma-reaktionsapparat og fremgangmåde til behandling af et substrat,申请号DK19900104938T-传众专利搜索

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发明名称	Plasma-reaktionsapparat og fremgangmåde til behandling af et substrat
摘要
申请公布号	DK0388800(T3)	申请公布日期	1997.06.09
申请号	DK19900104938T	申请日期	1990.03.15
申请人	THE BOARD OF TRUSTEES OF THE MICHIGAN STATE UNIVERSITY	发明人	ASMUSSEN, JES;REINHARD, DONNIE K.
分类号	B01J19/08;C23C16/27;C23C16/452;C23C16/50;C23C16/505;C23C16/511;C23C16/52;H01J37/32;(IPC1-7):H01J37/32;H05H1/46	主分类号	B01J19/08
代理机构		代理人
主权项
地址

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