| 摘要 |
PROBLEM TO BE SOLVED: To enhance the durability against thermal stress and strain using a simple manufacturing method. SOLUTION: A plurality of synthesized mica foils 101 chiefly containing fluoric phlogopite or potassium tetrasilicon mica are impregnated with a binder followed by drying, and in it a heat emitting element 10 in flat plate is pinched followed by heating at around 200 deg.C, pressurization, and lamination, and the obtained object is further heated to 800 deg.C so that the synthesized mica foils 101 are turned in ceramic. This consolidates the mica foils 101 with the heat emitting element 10, and a heat emitting plate 1 is completed. A quartz glass plate 3 is provided a recess 3a at its main surface, and the heat emitting plate 1 is accommodated in the recess 3a in the glass plate 3 and thereon another quartz glass plate 2 is superposed, and the two glass plates 2, 3 are put in tight attachment at their peripheral edges, and thus an intended quarts plate heater is achieved. |
