发明名称 RADIATION SENSITIVE RESIN COMPOSITION
摘要 <p>PROBLEM TO BE SOLVED: To improve heat resistance, adhesion, transparency, chemical resistance, etc., by incorporating a copolymer contg. unsatd. carboxylic acid and a specified epoxy group-contg. radical-polymerizable compd. as copolymerized components, a 1,2-quinonediazido compd. and a potential acid generating agent. SOLUTION: This compsn. contains a copolymer contg. unsatd. carboxylic acid and an epoxy group-contg. radical polymerizable compd. represented by the formula as copolymerized components, a 1,2-quinonediazido compd. and a potential acid generating agent. The copolymer may further contain other radical-polymerizable compd. copolymerizable with the unsatd. carboxylic acid and the epoxy group-contg. radical-polymerizable compd. as a copolymerized component. In the formula, each of R1 -R3 is H or 1-10C alkyl and (m) is an integer of 1-5.</p>
申请公布号 JPH09146276(A) 申请公布日期 1997.06.06
申请号 JP19950304023 申请日期 1995.11.22
申请人 JAPAN SYNTHETIC RUBBER CO LTD 发明人 SHIMADA ATSUFUMI;SHIMOKAWA TSUTOMU;ENDO MASAYUKI
分类号 G03F7/004;G02B5/20;G03F7/022;G03F7/027;G03F7/029;G03F7/032;G03F7/033;G03F7/039;H01L21/027;(IPC1-7):G03F7/039 主分类号 G03F7/004
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