| 摘要 |
<p>PROBLEM TO BE SOLVED: To securely execute a wet processing on a substrate with a simple processor constitution in the wet processor used at the time of wet-processing the substrates of various electronic products. SOLUTION: The processor is provided with a cassette 7 which vertically holds the substrates 3 and a processing bath 5 which installs the cassette 7 and to which processing liquid by which a wet processing is executed on the substrates 3 is introduced. In such a case, slits 20 for allowing processing liquid introduced from a processing liquid inlet 9 to flow to the internal part of the cassette are formed at the bottom part 19 of the cassette 7. A cassette holding part 13 holding the cassette 7 and guiding the flow of processing liquid so that processing liquid flows into the cassette is provided for the processing bath 5.</p> |
