| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanning probe microscope for measuring friction force acting between a sample surface and a probe tip with a high sensitivity. SOLUTION: A vibration means for causing the tips of a cantilever to be in single vibration in vertical directions each other so that the tip of a probe 2 provided at the tip of a cantilever 4 can draw a desired litharge trajectory has a Z modulation piezoelectric body 24 which is connected to a Z modulation power supply 22 and an X modulation piezoelectric body 30 connected to an X modulation power supply 28 via a delay circuit 26. The Z modulation piezoelectric body causes the tips of the cantilever to be in single vibration in vertical direction by applying an AC voltage with a modulation frequency of fz from a Z modulation power supply. The X modulation piezoelectjic body causes the tips of the cantilever to be in single vibration horizontally by applying an AC voltage with a modulation frequency of fx via the delay circuit from the X modulation power supply. In this case, two modulation frequencies are prescribed to a relationship of fz:fx:3:2 and the phase difference is prescribed to a relationship of (n-1)π(n; natural number).
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