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经营范围
发明名称
VERTICAL CVD DEVICE
摘要
申请公布号
JPH09148254(A)
申请公布日期
1997.06.06
申请号
JP19950305358
申请日期
1995.11.24
申请人
NEC YAMAGATA LTD
发明人
SUGAWARA ICHIRO
分类号
C23C16/44;C23C16/455;H01L21/205;H01L21/31;(IPC1-7):H01L21/205
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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