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发明名称
MANUFACTURE OF COPPER-MADE VACUUM CHAMBER
摘要
申请公布号
JPH09148100(A)
申请公布日期
1997.06.06
申请号
JP19950302739
申请日期
1995.11.21
申请人
TOSHIBA CORP
发明人
YOSHIYUKI TAKESHI
分类号
H05H13/04;(IPC1-7):H05H13/04
主分类号
H05H13/04
代理机构
代理人
主权项
地址
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