| 摘要 |
PROBLEM TO BE SOLVED: To obtain an acceleration sensor for reducing assembly with a simple configuration by detecting the acceleration in multiple directions within a plane with less directivity such as an earthquake. SOLUTION: An acceleration sensor consists of a substrate 30, a cylindrical weight movable electrode 12 which is displaced due to acceleration, a fixed electrode 13 whose inside is in a shape where a column is hollowed out, a column-shaped anchor part 11 where the movable electrode 12 is supported by an elastically deformed structure material and which is installed on the substrate 30, and four beam parts 14-17. When the sensor receives acceleration from the outside, a movable electrode detection surface 18 of a column surface and a surface 19 to be detected of the fixed electrode of the column surface contact each other in a two-dimensional plane which is in parallel with the substrate 30 and the sensor operates to detect the contact. At this time, the gap between the movable electrode detection surface 18 and the fixed electrode surface to be detected 19 is set so that outer force can be detected isotropically considering the coefficient of elasticity of the beam parts 14-17, thus detecting the acceleration of the two-dimensional plane omnidirectionally. |
