| 摘要 |
PROBLEM TO BE SOLVED: To control a charged particle beam device so that the image of a desired observed pattern is invariably located in the observation visual field, i.e., at the center of the display device of an image display device, when the observed pattern is observed in the direction other than XY directions. SOLUTION: An image position arithmetic processor 15 calculates the position fluctuation quantitiesΔX,ΔY of a pattern on a monitor 13 caused by the slant shift of a stage 11 in sequence. An image position correcting device 18 controls a deflection circuit 19 and corrects the position of an electron beam 1 if the position fluctuation quantitiesΔX,ΔY are within the beam deflection quantities, and it controls an XY stage control device 23 and corrects the position of an XY stage 12 if the position fluctuation quantityΔX,ΔY are outside the range of the beam deflection quantities. The above actions are repeatedly implemented during the slant shift of the stage 11. The pattern is located in the prescribed region on the monitor 13 after the slant shift of the stage 11 is completed, the position readjustment is not required after the stage 11 is stopped, and the efficiency of the observation work can be improved.
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