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发明名称
OBJECT OBSERVING UNIT
摘要
申请公布号
JPH09145308(A)
申请公布日期
1997.06.06
申请号
JP19950323891
申请日期
1995.11.17
申请人
NIKON CORP
发明人
HAGIWARA TSUNEYUKI
分类号
G01B9/02;G01B9/04;G01N21/41;G02B21/00;(IPC1-7):G01B9/02
主分类号
G01B9/02
代理机构
代理人
主权项
地址
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