METHOD FOR ANALYZING CONTAMINATION OF INSIDE OF HOLE,申请号JP19950298699-传众专利搜索

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发明名称	METHOD FOR ANALYZING CONTAMINATION OF INSIDE OF HOLE
摘要
申请公布号	JPH09145564(A)	申请公布日期	1997.06.06
申请号	JP19950298699	申请日期	1995.11.16
申请人	NEC CORP	发明人	AOKI HIDEMITSU
分类号	G01N21/73;G01N1/28;G01N21/31;G01N33/00;G01N33/20;H01L21/66;(IPC1-7):G01N1/28	主分类号	G01N21/73
代理机构		代理人
主权项
地址

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