PROBE CARD AND MICROCONTACT PIN

摘要

PROBLEM TO BE SOLVED: To realize a pin contact structure of contact pins each having an elastic structure and capable of forming a high density configuration by forming micro contact pins having a conductivity on one end of a vertically movable beam and piezoelectric elements to move the beam up and down. SOLUTION: A beam 4 having an elasticity in the vertical direction is formed on a first Si substrate 8 by the micromachining technique, microcontact pins 5 facing at electrodes of an element under test are formed on the top end of the beam 4 by forming a conductive film on this top end and conductively connected to a third Si substrate 15 through via holes 9. filmy piezoelectric elements 6 are insulatedly formed so as to hold the beam therebetween like a sandwich and two terminals of the element 6 are conductively connected to a piezoelectric element driving circuit 11 on the substrate 15 through via holes. This realizes a stable electric contact with the electrodes of the element under test.