| 摘要 |
PROBLEM TO BE SOLVED: To enable the half bandwidth of an optical semiconductor device to be accurately measured at a high speed. SOLUTION: A first measurement step is carried out, wherein light emitted from an optical semiconductor element 2 is projected onto the surface of a semi-transparent screen 1, and an image projected onto the rear of the screen 1 is recognized by a recognition device 3, whereby the intensity of light emitted from the element 2 is measured corresponding to an angle of irradiation. Then, a positional relation between the screen 1 and the recognition device 3 is kept constant, and the screen 1 is displaced in parallel or the optical semiconductor element 2 is moved along a normal to the surface of the screen 1. Thereafter, a second measurement step is carried out, wherein light emitted from the optical semiconductor element is made to irradiate the surface of the displaced screen 1, an image projected onto the rear of the screen 1 is recognized by the recognition device 3, whereby the intensity of light emitting from the element 2 is measured corresponding to an angle of irradiation. |
