| 摘要 |
PROBLEM TO BE SOLVED: To obtain a compsn. contg. a nearly harmless solvent satisfying sufficiently high power to dissolve a resist material, a proper rate of evaporation, proper surface tension and viscosity by using a specified acetic ester. SOLUTION: This compsn. is a chemical amplification type photosensitive resin compsn. contg. a resin soluble in an aq. alkali soln., a compd. which generates an acid when irradiated with active chemical rays, a medium having such reactivity as to vary solubility to the aq. alkali soln. by a reaction with the acid as a catalyst and a solvent which is 5-9C acetic ester represented by the formula (where R is 3-7C alkyl, alkenyl, alkynyl or phenyl), e.g. n-propyl acetate, isopropyl acetate, isopropenyl acetate, n-butyl acetate or isobutyl acetate. |
