| 摘要 |
PROBLEM TO BE SOLVED: To provide an objective lens for scanning electron microscope capable of preventing the heating of the tip section of the conical objective lens. SOLUTION: A heat conductor 6 made of a material having a high heat conduction coefficient, e.g. aluminum or copper, is arranged in close contact with a yoke on the outside of a conical objective lens (on the outside of the outside yoke 3). The heat conductor 6 is formed into a hollow conical shape, and part of it is notched. The notched portion is located in the inclining direction of a sample 5, and the notch section 7 is faced to the inclined sample 5. The inclination angleθof the sample 5 is not limited by the heat conductor 6. The upper section of the heat conductor 6 is kept in contact with a member having a large heat capacity, e.g. a lens barrel 8.
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