ROTARY SUBSTRATE PROCESSOR,申请号JP19950307714-传众专利搜索

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发明名称	ROTARY SUBSTRATE PROCESSOR
摘要
申请公布号	JPH09148295(A)	申请公布日期	1997.06.06
申请号	JP19950307714	申请日期	1995.11.27
申请人	DAINIPPON SCREEN MFG CO LTD	发明人	FUJITA MITSUHIRO;SASAKI TADASHI;IKEDA MASAHIDE;NISHIMURA JOICHI
分类号	B08B1/04;B08B3/02;H01L21/304;(IPC1-7):H01L21/304	主分类号	B08B1/04
代理机构		代理人
主权项
地址

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