| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection device of compact constitution in a SQUID (superconducting quantum interference device) flaxmeter applied to non- destructive inspection for inspecting the defect, corrosion, and the like of metal in a non-destructive and contactless state. SOLUTION: A SQUID 1 consisting of two Josephson junctions 3, a washer coil 4, a shunt resistance 5, a damping resistance 6 and a feedback modulation coil 8 is formed of a superconducting thin film on a substrate 14, and a magnetic field impressing coil 9 is formed of a superconducting thin film or a normal conducting metallic thin film on the same substrate 14. The magnetic field impressing coil 9 is wound plural times around the SQUID 1 so as to impress the DC or AC inspection magnetic field on a sample. The change of the magnetic field caused by the defective part of the sample is directly detected by the washer coil 4 to inspect the position and size of a defect. Since the magnetic field impressing coil 9 is integrated on the same substrate where the SQUID 1 is formed, the scale enlargement of a device is suppressed, and constitution is simplified.
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