摘要 |
The method involves using a spreading apparatus having a channel (11) and a particle barrier (1). The channel outputs the spacer particles (10) and the barrier is formed on the inner wall of the channel and is, e.g. thermally or piezo-electrically, deformable such that the channel becomes blocked. During the spreading process, the rate at which the spacer particles are output to the substrate is controlled through the operation of the deformable barrier. The width of the channel is variable, due to the barrier, to between 1.2 to 1.8 times the spacer width.
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申请人 |
SHARP K.K., OSAKA, JP |
发明人 |
HIRATA, SUSUMU, NARA, JP;MATOBA, HIROTSUGU, SAKURAI, NARA, JP;ISHII, YORISHIGE, YAMATOTAKADA, NARA, JP;ABE, SHINGO, TENRI, NARA, JP;ONDA, HIROSHI, YAMATOKORIYAMA, NARA, JP;INUI, TETSUYA, NARA, JP |