Micro-contact pin structure for IC test card

摘要

The contact structure has an electrically conductive micro-contact strip formed at the end of a strip which is movable in the vertical direction. A piezoelectric element formed on the strip moves the strip in the vertical direction. The strip may be made of silicon, with a conductive thin layer on its surface. The microcontact pin is preferably a pyramid shape. The piezoelectric element may be a two element crystal plate arranged on the upper surface of the strip. Alternatively, the piezoelectric element may be formed of two, two element crystal plates arranged on an upper or lower surface of the strip. The contact structure may be associated with an electrode of a semiconductor circuit arranged on a wafer. A test card for making an electric connection between this electrode and a semiconductor test system may thus use such a structure.