Dispersion compensation method with interferometers with object beam path

摘要

The method compensates for the difference between the wavelength dependency of the light path in the object beam path and the wavelength dependency of the optical light path in the reference beam path, called up by refractive index dispersion. In the object beam path or in the reference beam path or in both beam paths, one or more optical systems namely balance systems are installed. These alter the wavelength dependency of the optical path length of the respective beam path, so that the wavelength dependency of the object beam path and the reference beam path synchronise. At least one part of the installed balance system (21) effects at the most an inessential alteration of the geometric beam path.