| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface inspecting apparatus, wherein defects other than stripe-shaped defects are not erroneously detected as the stripe-shaped defects, and the stripe-shaped defect is not erroneously detected as a plurality of the defects even if the continuous stripe-shaped defect is cut in halfway or bent. SOLUTION: A surface inspecting apparatus 100 has a two-dimensional image pickup device 3, which receives reflected light 2a from a region under inspection 17 on the surface of a material under inspection 1 running in the direction of an error mark A and forms the two-dimensional image data indicating the two-dimensional image of the region under inspection 17, and a defect detecting means 4, which detects the defect based on the two-dimensional data obtained in the two-dimensional image pickup device 3 and outputs the result of the defect detection. Then, a memory means 9 stores the result of the defect detection outputted from the defect detecting means 4 for a plurality of the regions under inspection. A defect evaluating means 10 evaluates the defect in the region under inspection 17 based on the result of the defect detection for a plurality of the regions under inspection. The constitution such as this is provided. |
