| 摘要 |
PROBLEM TO BE SOLVED: To provide a dense ceramic thin film (solid electrolyte thin film and the like) in a range of 10 to several hundreds μm having quantity productivity, easy applicability for large area, and economical efficiency. SOLUTION: Slurry containing particles of ceramic material is prepared, and sol containing the particles of the ceramic material is prepared. The slurry and the sol are individually applied onto a substrate, are dried so as to stack plural coating layers of the slurry or the sol, and the stacked layers are burnt together. The sol particles play a role as sintering auxiliaries. |
