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发明名称
Semiconductor device manufacturing apparatus and semiconductor device menufacturing method
摘要
申请公布号
EP0644574(B1)
申请公布日期
1997.06.04
申请号
EP19940112773
申请日期
1994.08.16
申请人
HITACHI, LTD.
发明人
KAWADA,HIROKI;TAKAHASHI,KAZUE;EDAMURA,MANABU;KANAI,SABURO;TAMURA,NAOYUKI
分类号
H01L21/302;H01J37/32;H01L21/205;H01L21/3065;(IPC1-7):H01J37/32
主分类号
H01L21/302
代理机构
代理人
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