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发明名称
摘要
申请公布号
JP2616944(B2)
申请公布日期
1997.06.04
申请号
JP19880000099
申请日期
1988.01.05
申请人
发明人
分类号
C23C2/06;C23C2/14;C23C2/28;(IPC1-7):C23C2/06
主分类号
C23C2/06
代理机构
代理人
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