| 摘要 |
<p>PURPOSE:To provide a device which automatically carries wafers to and from a cassette without manual operation of the operator and does not make scratches on the wafers at the time of carriage by providing the device with a cassette mount table, a wafer mount table, a specific wafer sucking arm and a driving device. CONSTITUTION:A wafer carrying device is provided with a cassette mount table 1 for mounting a wafer storing cassette 23 and a wafer mount table 8 for mounting wafers 24. A vertically movable wafer sucking arm 11, which also moves to-and-from between the wafer mount table 8 and the wafer storing position on the cassette 23, and a driving device which controls the wafer sucking arm 11 are also provided. For example, the cassette mount table 1 is provided with a block 5 which comes out from the cassette mount plane. The wafer sucking arm has a wafer sucking part 11a at the tip and is driven by the vertical movement mechanism and the front and rear movement mechanism of the driving device.</p> |
