发明名称 |
Variable curvilinear axis deflection means for particle optical lenses |
摘要 |
An improved particle lens has an axis which is shifted to follow the central ray as it is deflected through the lens creating, in effect, a variable curvilinear optical axis for the lens. The variable curvilinear optical axis is created for the lens so that the axis varies proportionally to the magnitude of the beam deflection. The optical axis of the lens is shifted by applying a uniform field to the lens to cancel the first term of the radial field with a function that is dependent on the position along the z-axis. This function is the trajectory of the central ray of the electron beam.
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申请公布号 |
US5635719(A) |
申请公布日期 |
1997.06.03 |
申请号 |
US19960685278 |
申请日期 |
1996.07.23 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
PETRIC, PAUL F. |
分类号 |
H01J37/141;H01J37/153;H01J37/30;(IPC1-7):H01J37/147 |
主分类号 |
H01J37/141 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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