| 摘要 |
A micromachined device has a plurality of rotationally dithered masses that are used to sense acceleration. To eliminate common modes, the masses are dithered in an equal and opposite manner. To help maintain this relationship between the movement of the masses, a coupling fork provides minimal resistance to anti-phase movement and substantial resistance to in-phase movement. Electrodes are used to detect changes in capacitance between the masses and the substrate resulting from rotation of the device about a radial axis of a mass. These electrodes are electrically connected to eliminate gradients that are caused by external forces and manufacturing differences. Four masses or more can be provided, arranged in a two-dimensional array, such as a square or hexagon with a coupling fork provided between each pair of masses, and with electrodes connected to eliminate gradients.
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