Method and apparatus for the production of a structure by focused laser radiation on a photosensitively coated substrate

摘要

A system for writing geometric structures on a photosensitive substrate including a modulated laser beam source, a focusing lens, a deflector for producing a scanning action between the light source and the lens, and a device for mechanically moving the surface relative to the laser beam. Compressed data for use in writing the geometric structures is read out of a memory into a data delivery circuit such that the data is formatted to have both beam power and position information. A modulator logic circuit operates to call up the data from the data delivery circuit, form a modulation drive signal based on the power information, and delay the modulation drive signal based the position data. The modulator logic circuit thus operates to vary the modulation drive signal to begin or end exposure along the scan lines with greater resolution or pixel density by at least a factor of four more than the resolution or spacing density between adjacent scan lines. The scan lines are arranged within stripes, and adjacent stripes preferably are made to overlap such that the stripes are blended in the overlap according to a predetermined stepwise changing function.