发明名称 |
Electronic coating materials using mixed polymers |
摘要 |
The present invention relates to a method of forming coatings on electronic substrates and the substrates coated thereby. The method comprises applying a coating comprising hydrogen silsesquioxane resin and a polysilazane on a substrate and heating the coated substrate at a temperature sufficient to convert the resins to ceramics.
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申请公布号 |
US5635240(A) |
申请公布日期 |
1997.06.03 |
申请号 |
US19950491734 |
申请日期 |
1995.06.19 |
申请人 |
DOW CORNING CORPORATION |
发明人 |
HALUSKA, LOREN A.;MICHAEL, KEITH W. |
分类号 |
C04B41/50;C04B41/87;H01L21/312;H01L21/316;H01L23/29;(IPC1-7):B05D1/12 |
主分类号 |
C04B41/50 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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