发明名称 |
Method of manufacturing field effect transistor |
摘要 |
An element separating oxide film is formed in a surface of a p-type silicon substrate for separation of an element forming region. A p-type impurity diffusion region extends from the vicinity of a lower surface of the element separating oxide film to a position at a predetermined depth in the element forming region. The p-type impurity diffusion region has a peak of concentration of impurity. In the element forming region adjacent to the element separating oxide film, an n+ impurity diffusion region is formed on the surface of the p-type silicon substrate. An n- impurity diffusion region adjacent to the n+ impurity diffusion region is formed between the n+ impurity diffusion region and the p-type impurity diffusion region.
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申请公布号 |
US5635413(A) |
申请公布日期 |
1997.06.03 |
申请号 |
US19950437743 |
申请日期 |
1995.05.08 |
申请人 |
MITSUBISHI DENKI KABUSHIKI KAISHA |
发明人 |
MITSUNAGA, KAZUMASA;MOTONAMI, KAORU;YOSHIDA, HISAAKI |
分类号 |
H01L21/265;H01L21/336;H01L21/74;H01L21/76;H01L21/762;H01L29/10;H01L29/78;(IPC1-7):H01L21/823 |
主分类号 |
H01L21/265 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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