| 摘要 |
A substrate transport path adjustment method allows adjustment of the transport path of a substrate to be completed by placing a magazine between regulating members for regulating the position of the magazine provided roughly in a straight line with respect to guide members which guide a substrate along a prescribed path, positioning the magazine with respect to the prescribed path by moving both regulating members in synchronization and in the same direction after causing the regulating members to engage with the magazine by moving them relatively in the direction in which they approach each other, pushing the substrate out from the magazine to bring it between the guide members, and causing the guide members to approach the substrate. In addition, after causing the guide members to approach each other, and positioning the substrate with respect to the prescribed path by moving the guide members in synchronization and in the same direction, each of the regulating members are caused to approach each other and to be positioned at a regulating position corresponding to this positioned substrate. Moveover, after the substrate is arranged between the guide members, and corresponding guide members are moved relatively in the direction in which they approach each other by driving devices to engage with the substrate, both the guide members are moved in synchronization and in the same direction to position the substrate with respect to the prescribed path. |
