FILM FORMING DEVICE AND USING METHOD THEREFOR

摘要

PROBLEM TO BE SOLVED: To provide a treating device which does not require the execution of the operation to carry works into and out of the outside at the time of executing an auxiliary treatment exclusive of a main treatment. SOLUTION: This film forming device has a transporting chamber 24 which is maintained in a vacuum state and carries the works transported from the fore stage thereof into and out of the treating chamber in the stage before the treating member 22 where the film treatment is executed to work W. In such a case, this transporting chamber is successively provided with a dummy work housing chambers 26 for housing at least two kinds of the dummy works among the dummy work for cleaning, the dummy work for color deposition, the dummy work for monitor and the dummy work for dummy run in such a manner that the state communicating with the transporting chamber is maintained. The auxiliary treatment is executed by taking in the dummy works not from the outside but from this dummy work housing chamber. As a result, the time loss accompanying the carrying-in and out operation is minimized.