| 摘要 |
PROBLEM TO BE SOLVED: To contrive so that the gap of the periphery of a spindle which becomes the rotary center of an adsorbing table, can be uniformly held without performing a severe dimensional control, and to simply and securely prevent a deviation in a position of the adsorbing table, caused by looseness near the rotation center. SOLUTION: The XY table is composed as follows; that is, a gap (gap between spindle 10a and shaft hole 9a) of the periphery of a spindle 10a becoming the rotary center of an adsorbing table 9, is filled with a gap maintenance agent 19 made by mixing grease with a lot of resin balls (resin spacer) 19a with a prescribed size. As these resin balls 19a, those whose diameters before filling are larger than a gap around a shaft, are used. |
