| 发明名称 |
Damage-free laser surface treatment method |
| 摘要 |
<p>A method and apparatus for preventing surface damage of an object being laser treated, comprising extending the laser pulse generated by a laser, before it reaches the surface to be ablated.</p> |
| 申请公布号 |
AU7331096(A) |
申请公布日期 |
1997.05.29 |
| 申请号 |
AU19960073310 |
申请日期 |
1996.11.04 |
| 申请人 |
ORAMIR SEMICONDUCTOR EQUIPMENT LTD. |
发明人 |
BORIS LIVSHITS (BUYANER);MENACHEM GENUT;OFER TEHAR-ZAHAV |
| 分类号 |
B23K26/06;B23K26/12;G03F7/42;H01L21/027;H01L21/302;H01L21/3065;H01L21/311 |
主分类号 |
B23K26/06 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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